February 20, 2007

SII NanoTechnology Inc.
Carl Zeiss SMT AG

SII NanoTechnology Inc (SIINT hereafter) and the Nanotechnology Systems Division of Carl Zeiss SMT AG today announce the establishment of the "Yokohama Demonstration Laboratory" located Yokohama-city, Kanagawa Pref. The first demonstration activities already started in February 2007. At the Yokohama Demonstration Laboratory, ZEISS electron microscopes (SEM and TEM), focused ion beam systems (FIB) produced by SIINT, and products jointly developed by both companies (FIB/SEM hybrid systems) are installed, and this site will be utilized as the center for demonstration, application development and support and user seminars for those products. SIINT and Carl Zeiss SMT entered into a global strategic alliance in March 2006, and launched joint product development and joint sales of existing products. The Yokohama Demonstration Laboratory is the first comprehensive demonstration site showing the full system and process solution portfolio of Carl Zeiss SMT's Nanotechnology Systems Division in Japan.

This establishment is the notable achievement of the strategic alliance of both companies. By utilizing this facility, rich information on SEM/TEM/FIB tools of both companies will be provided, satisfaction of customers in industry and academic research in Japan shall be improved.

Address:	German Center, 1-18-2, Hakusan, Midori-ku, Yokohama-shi, Kanagawa 226-0006, Japan
TEL:	+81-45-938-0171
Dimension:	430m2
Facility:	5 demonstration rooms, 1 drawing room. 1 meeting room and office