| Acceleration
Voltage |
120
and 200 kV |
| Illumination
System |
Highly
flexible advanced Koehler illumination system |
| Objective
Lenses |
Truly symmetrical
type |
| Resolution |
Point-to-Point:
0.24 nm(HR), 0.29 nm(HT)
Information Limit: <0.14 nm(HR), <0.19 nm(HT)
STEM: <0.30 nm(HR), <0.45 nm(HT) |
| Spectrometer |
2nd order
aberration corrected OMEGA type |
| Dispersion |
1.85 µm/eV
@ 200 kV |
| Energy resolution |
<0.7
eV |
| Distortion |
<1.5
% |
| Acceptance
angle |
100 mrad
@ Δ = ±5 eV |
| Isochromaticity |
<0.5
eV in 2.5 µm O |
| Specimen
Stage |
5-axes
fully eucentric goniometer |
| Tilt range
α/β |
±30°/
±30°(HR), ±70°/ ±30°(HT) |
| Imaging System |
Two 3 lens
projector groups in front and below the energy filter for
rotation free imaging and spectroscopy |
| Magnification |
TEM: 8
- 1,000,000 x, STEM: 2,000 - 5,000,000x, EELS: 20 - 315x |
| Modes of
Operation |
TEM, EFTEM,
EELS, Elemental Contrast and Analysis, CBED/LACBED, EDS, STEM
(BF/DF/HAADF) |
| Vacuum System |
Oil-free
differential vacuum system
Pre-vacuum scroll pump with buffer tank
TMP for viewing chamber, filter and airlock
Two IGPs (50/20 l/s) for the column
Two IGPs (55 l/s) for the emitter area |
| System Control |
WinTEM・Graphical
User |
| Interface
(GUI) with Windows®XP, operated by mouse, keyboard and
dedicated control panels. |
|
|
